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01 CCSS / CRS / Bulk / CDS / DCS
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- Central Chemical Supply System
- - Bulk Chemical Supply System - Acid / Alkali / Solvent (Pump or N2 Pressure Supply)
- - Chemical Mixing / Dilution System
- - ACQC (Auto Clean Quick Coupler) System for Tank Lorry Stystem
- Chemical Recycle System
02 Chemical Product Facility
- HF, NH4F, BOE, NH4OH ETC
- Photo Resist, Solvent 二次电池电解液
- HF 片剂 , 表面活性剂, DIW, ETC